medium silicon pressure sensor die p111 features ? highly reliable, solid state silicon pressure sensors ? available in absolute and differential versions ? standard pressure ranges: 0 to 100, 0 to 200, and 0 to 700 kpa ? nonlinearity < 0.25 %fso ? 2x overpressure limit applications ? process control systems ? pneumatic controls ? biomedical instruments ? hydraulic systems description novasensors p111 piezoresistive pressure sensors are offered in a miniature 0.10 in x 0.12 in (2.7 mm x 3.2 mm) die. when excited with 1.0 ma, the p111 produces a millivolt output that is proportional to input pressure. the p111 is available as an absolute pressure sensor where the media pressure is referenced to an internal vacuum sealed in the die. the p111 is also available as a differential and gage sensor. with novasensors senstable ? process, the p111 will provide very good long-term stability and excellent repeatability. sensor die have a 63 mil glass con - straint layer. for thicker isolation constraint contact the factory. a mphenol advanced sensors
p111 specifications parameter value units notes general pressure range 100 kpa -15 psi (-1 bar) 200 kpa -30 psi (-2 bar) 700 kpa -100 psi (-7 bar) maximum overpressure 2x rated pressure electrical @ 72f (25c) unless noted excitation 1.0 ma 10 vdc maximum input impedance 5000 20% ? output impedance 5000 20% ? environmental temperature range operating -40 to 257 f (-40c to 125c) storage -67 to 302 f (-55c to 150c) mechanical weight 0.00009 lb (0.04 grams) media compatibility clean dry air, non-corrosive gases performance parameters (1) value (6) units notes zero offset 50 mv 1 full scale (fs) output 133 33 mv linearity 0.25 %fso 2 pressure hysteresis 0.05 %fso temperature coeffcient of zero 30 v/ v / c 3 temperature coeffcient of resistance 0.27 % /c 3 temperature coeffcient of sensitivity -0.19 %fso/c 3 thermal hysteresis of zero 0.2 %fso 3 long term stability of fso 0.2 %fso 4 1. 0 kpaa for absolute sensors, 0 kpag for differential or gage sensors. 2. best ft straight line. 3. between 32f and 158f (0c and 70c). 4. typical value over one year. 5. all values measured at 77f (25c) and 1 ma excitation, unless otherwise noted. shipping and handling all wafers are shipped in protective containers. the wafers are sawn on sticky tape with plastic rings. all wafers are electrically probed and visually inspected. samples from each wafer verify offset , fs output , and linearity. electrical rejects are inked with red dots. visual rejects are inked with blue dots. each wafer will have the following information: lot number, wafer number, device number, and the number of good dice. warranty novasensor warrants its products against defects in material and workmanship for 12 months from the date of shipment . products not subjected to misuse will be repaired or replaced. novasensor reserves the right to make changes without further notice to any products herein. novasensor makes no warranty, representation or guarantee regarding the suitability of its products for any particular application. novasensor does not assume any liability arising out of the application or use of any product or circuit and specifcally dis - claims, and all liability, without limitation consequential or incidental damages. the foregoing warranties are exclusive and in lieu of all other warranties, whether written, oral, implied or statutory. no im - plied statutory warranty of merchantability or ftness for a particular purpose shall apply. aas-920-264b-07/2014 www.amphenol-sensors.com ? 2014 amphenol corporation. all rights reserved. specifcations are subject to change without notice. other company names and product names used in this document are the registered trademarks or trademarks of their respective owners. a mphenol advanced sensors die dimensions: 0.10 in x 0.12 in x 0.07 in (2.7 mm x 3.2 mm x 2 mm) p111 schematic diagrams ordering information minimum release quantity: 2 wafers or approximately 900 die part number description 51006 100 kpad/g 51007 200 kpad/g 51008 700 kpad/g 51010 100 kpaa 51011 200 kpaa 51012 700 kpaa
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